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| Metrology & Inspection Tencor Auto OmniMap RS55 / tc
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Metrology & Inspection > Tencor Auto OmniMap RS55 / tc
Manufacturer:KLA-Tencor
Condition:Used,we sell it at AS IS(Refurbished and Installation are optional)
Price:Best Offer
Amount: 2 sets
* Four Point Probe Resistivity Mapping System with Temperature Compensation and Wafer Handler.
* Cassette to cassette measurement.
* Display modes include contour maps, 3-D plots and diameter scans.
* Can compensate sheet resistance measurements against ambient temperature and materials TCR.
* 50mm - 200mm Wafers, <5mohms/sp to > Megohm/sp
* Measurement Range
* Typical Measurement Time: 3.5 - 4.5 Seconds per Test Site * <0.2%(1sigma) Measurement Repeatability
* Thermal Chuck Temperature Measurement Accuracy:+/-0.5''C
* PC based System
* X-Y Map: Up to 1200 Sites Programmable, Probe
* Qualification: 20 sites
* 1-30 Programmable Routines Test Sites (ASTM Standard Tests Included)
* 115V, 50/60 Hz.
Inventory on sale:
Bunch Sell List
Backside Equipment
Deposition Equipment
Dry Asher Etch RIE ICP
Electronic Tester
Iron Implanter
Lithography & Photoresist
Metrology & Inspection
Rapid Thermal Process
Sputtering and Evaporator System
Wafer Probe
Wet Processing Equipment |
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